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手性相位成像元传感器

  • Ahmet M. Erturan , Jianing Liu , Maliheh A. Roueini , Nicolas Malamug , Lei Tian and Roberto Paiella ORCID logo EMAIL logo
Published/Copyright: March 25, 2025
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Abstract

1 Introduction

Tr

一个

Figure 1: 
Chiral metasurface photodetectors. (a) Schematic device structure. At the target detection angle, one circular polarization component of the incident light is reflected, while the other is coupled to SPPs. (b) Calculated transmission through the device metasurface for RCP and LCP light at λ
0 = 1,550 nm versus angle of incidence θ on the x–z plane. The shaded region shows the range of possible angles of incidence on the sensor array for a representative microscope configuration with 0.8 objective numerical aperture and 20× magnification. (c) Reciprocal-space diagram illustrating the plasmon excitation process in these devices, for light incident along 3 representative directions (labeled A, B, and B′). The red and orange arrows represent the wavevector k
SPP
 and spin angular momentum σ
SPP
 of the excited SPPs. The combined phase-matching action of the metasurface resonance and PB phase is indicated by the horizontal black arrows. The panel on the right-hand side shows the directional relation between in-plane wavevector k
||
 (blue arrow) and spin σ
||
 (green arrow) for LCP and RCP light. The SPP excitation efficiency is enhanced (suppressed) when σ
||
 is parallel (antiparallel) to σ
SPP
.
Figure 1:

Ch

Th

2 Results

2.1 Metasurface design

Th

(1) M = 1 2 r ξ + r ψ r ξ r ψ e i 2 α r ξ r ψ e i 2 α r ξ + r ψ .

Here, r ξ and r ψ are the amplitude reflection coefficients for linearly polarized light along the two axes of the rectangular NP, and α is the NP orientation angle relative to the sides of the square unit cell (Figure 2a). If the NPs are designed so that r ξ + r ψ r ξ r ψ , most of the incident RCP light experiences a reversal in the direction of field rotation accompanied by a total phase shift φ t o t = arg r ξ r ψ + 2 α . Similarly, the LCP component is scattered with the same resonance phase φ r e s = arg r ξ r ψ but equal and opposite PB phase φ PB = −2α. The selective detection of either state of circular polarization in the proposed PIMSs is enabled by this sign difference for the PB phase contribution.

Figure 2: 
Design simulations. (a) Schematic top-view image of a meta-unit. (b) Calculated scattering efficiency 
1
4
r
ξ
−
r
ψ
2
$\frac{1}{4}{\left\vert {r}_{\xi }-{r}_{\psi }\right\vert }^{2}$
 versus resonance phase 
φ
r
e
s
=
arg
r
ξ
−
r
ψ
${\varphi }_{\mathrm{r}\mathrm{e}\mathrm{s}}=\mathrm{arg}\left\{{r}_{\xi }-{r}_{\psi }\right\}$
 for all simulated NPs. The red circles indicate the NPs used in the devices reported in this work. (c) Total scattering phase φ
tot = φ
res + φ
PB of all the NPs in the metasurface of device R versus NP number for RCP (red) and LCP (blue) incident light. Device L features the same scattering phase profiles with the two states of circular polarization interchanged.
Figure 2:

Design simulations. (a) Schematic top-view image of a meta-unit. (b) Calculated scattering efficiency 1 4 r ξ r ψ 2 versus resonance phase φ r e s = arg r ξ r ψ for all simulated NPs. The red circles indicate the NPs used in the devices reported in this work. (c) Total scattering phase φ tot = φ res + φ PB of all the NPs in the metasurface of device R versus NP number for RCP (red) and LCP (blue) incident light. Device L features the same scattering phase profiles with the two states of circular polarization interchanged.

Sp

For the detection of light with k along the x direction and angle of incidence θ p (e.g., point A in the reciprocal-space diagram of Figure 1c), this phase matching condition becomes Δ k t o t = k 0 n S P P sin θ p , where k 0 = 2π/λ 0 and n SPP is the SPP effective index. To enforce this condition for RCP light, we select the NP dimensions and orientations such that Δφ res and Δα satisfy

(2) Δ φ r e s = 2 Δ α = k 0 n S P P sin θ p Δ x / 2 .

With these prescriptions, the resonance and PB phase produce equal contributions to the RCP in-plane wavevector shift Δ k t o t = Δ φ r e s + 2 Δ α / Δ x , which add up to each other to bridge the k mismatch k 0 n S P P sin θ p between the incident light and SPPs (black arrows in Figure 1c). In contrast, under LCP illumination the resonance and PB contributions of the same metasurface become equal and opposite (due to the sign change in the latter), and therefore cancel each other to yield Δk tot = 0. As a result, scattering of LCP light by the metasurface simply results in specular reflection without SPP excitation. Similarly, if Δα in Eq. (2) is replaced by −Δα (i.e., the NPs are rotated by the same angle as in the previous design but in the opposite direction), the metasurface will selectively couple LCP light incident at θ p to SPPs while at the same time reflecting the RCP component.

通用电气

2.2 Device fabrication and characterization

Figure 3: 
Measurement results. (a) Top-view SEM images of the metasurfaces in the two devices reported in this work, illustrating their chiral relationship. (b), (c) Responsivity of device R versus polar θ and azimuthal ϕ angles of incidence for RCP (b) and LCP (c) light. (d) Horizontal line cuts of the color maps of (b) and (c) (red and blue traces, respectively). (e), (f), (g) Same as (b), (c), (d) for device L. All the data presented in these plots were measured at 1,550-nm wavelength and were normalized to the responsivity of a similar device without any metasurface.
Figure 3:

Measurement results. (a) Top-view SEM images of the metasurfaces in the two devices reported in this work, illustrating their chiral relationship. (b), (c) Responsivity of device R versus polar θ and azimuthal ϕ angles of incidence for RCP (b) and LCP (c) light. (d) Horizontal line cuts of the color maps of (b) and (c) (red and blue traces, respectively). (e), (f), (g) Same as (b), (c), (d) for device L. All the data presented in these plots were measured at 1,550-nm wavelength and were normalized to the responsivity of a similar device without any metasurface.

Th

All the data presented in these figures are normalized to the measured normal-incidence responsivity of a similar device without any metasurface (29 mA/W/V). The resulting peak values observed in Figure 3d and g [about 29 % and 27 % for the RCP and LCP responsivity of devices R and L, respectively] are reasonably consistent with expectations. Specifically, from the ratio between the peak metasurface transmission computed in Figure 1b (28 %) and the Fresnel transmission of the uncoated Ge surface in the reference sample (62 %), the expected normalized peak responsivity is 45 %. The difference between the measured and calculated values can be primarily ascribed to SPP scattering by surface roughness in the experimental samples, which is also responsible for the observed decrease in peak-to-background ratio in Figure 3d and g compared to Figure 1b.

一个

广告

Figure 4: 
Wavelength dependence. (a) Absolute value of the normal-incidence responsivity slope under RCP (red squares) and LCP (blue circles) illumination measured as a function of wavelength with device R. (b) Same as (a) for device L. All responsivity values are normalized as in Figure 3. The double arrows indicate the full width at half maximum of their respective traces.
Figure 4:

Wavelength dependence. (a) Absolute value of the normal-incidence responsivity slope under RCP (red squares) and LCP (blue circles) illumination measured as a function of wavelength with device R. (b) Same as (a) for device L. All responsivity values are normalized as in Figure 3. The double arrows indicate the full width at half maximum of their respective traces.

2.3 Computational imaging results

一个

Figure 5: 
Chiral phase imaging system. The sensor array is partitioned into blocks of four adjacent pixels coated with the metasurfaces of devices R, L, and their replicas rotated by 180° (labeled 
R
̄
$\bar{\mathrm{R}}$
 and 
L
̄
$\bar{\mathrm{L}}$
). In this example, the incident light consists of a superposition of RCP and LCP components with equal magnitudes and different phase profiles. The RCP (LCP) phase profile can be reconstructed from the readout signals of pixels R and 
R
̄
$\bar{\mathrm{R}}$
 (L and 
L
̄
$\bar{\mathrm{L}}$
). The experimental RCP and LCP angular response maps of all four pixels in each block are also shown for θ ≤ 6°. The black circle in each color map indicates the pupil-function cutoff frequency of the imaging optics, corresponding to a maximum angle of incidence θ
c = 2.3°.
Figure 5:

Chiral phase imaging system. The sensor array is partitioned into blocks of four adjacent pixels coated with the metasurfaces of devices R, L, and their replicas rotated by 180° (labeled R ̄ and L ̄ ). In this example, the incident light consists of a superposition of RCP and LCP components with equal magnitudes and different phase profiles. The RCP (LCP) phase profile can be reconstructed from the readout signals of pixels R and R ̄ (L and L ̄ ). The experimental RCP and LCP angular response maps of all four pixels in each block are also shown for θ ≤ 6°. The black circle in each color map indicates the pupil-function cutoff frequency of the imaging optics, corresponding to a maximum angle of incidence θ c = 2.3°.

The imaging system of Figure 5 can therefore be used to record, in a single shot, two independent differential-phase-contrast images of the RCP and LCP incident wavefronts, i.e., S R = I R ̄ I R / I R ̄ + I R and S L = I L ̄ I L / I L ̄ + I L . Specifically, the readout signal S R computed from the photocurrents I R and I R ̄ of each superpixel is zero, positive, or negative if the local angle of incidence θ of the RCP component is zero, positive, or negative, respectively, regardless of the total incident intensity and of the direction of propagation of the LCP component (and similarly for S L with the two states of circular polarization interchanged). Since local angle of incidence is proportional to transverse phase gradient, the resulting edge-enhanced images can then be numerically inverted to reconstruct the underlying RCP and LCP phase distributions.

(3) I F 1 R R C P k e i Δ k E R C P k + R L C P k E L C P k 2 .

Here F 1 denotes the inverse spatial Fourier transform evaluated at the pixel location, Δ k is the phase difference between the two transfer functions t R C P k and t L C P k , and E R C P k and E L C P k are the Fourier transforms of the incident RCP and LCP optical fields on the sensor array. Physically, the two terms in the curly brackets of eq. (3) correspond to the SPPs excited by the Fourier components of in-plane wavevector k of the RCP and LCP incident waves, which add up coherently to one another before being collected at the slits. To estimate Δ k , we have measured the angle-resolved photocurrent of our experimental samples under s and p linearly polarized illumination, and then we have used eq. (3) [with the data of Figure 3 for R R C P k and R L C P k ] to fit the resulting responsivity curves. This procedure (described in more detail in Supplementary material, Section S5) yields accurate fits with Δ ≈ 43° across the pupil-function passband of the envisioned microscope.

再保险

Figure 6: 
Chiral phase imaging simulation results. (a) Horizontal line cut through the middle of the differential-phase-contrast image 
S
R
r
${S}_{\mathrm{R}}\left(\mathbf{r}\right)$
 recorded by devices R and 
R
̄
$\bar{\mathrm{R}}$
 for the phase object of Figure 5. (b) Horizontal line cut of the differential-phase-contrast image 
S
L
r
${S}_{\mathrm{L}}\left(\mathbf{r}\right)$
 simultaneously recorded from the readout signals of devices L and 
L
̄
$\bar{\mathrm{L}}$
. (c) Phase profile 
φ
R
C
P
r
${\varphi }_{\mathrm{R}\mathrm{C}\mathrm{P}}\left(\mathbf{r}\right)$
 of the RCP component of the incident light (grey trace) and computationally reconstructed image (red trace). (d) Phase profile 
φ
L
C
P
r
${\varphi }_{\mathrm{L}\mathrm{C}\mathrm{P}}\left(\mathbf{r}\right)$
 of the LCP component of the incident light (grey trace) and computationally reconstructed image (blue trace).
Figure 6:

Chiral phase imaging simulation results. (a) Horizontal line cut through the middle of the differential-phase-contrast image S R r recorded by devices R and R ̄ for the phase object of Figure 5. (b) Horizontal line cut of the differential-phase-contrast image S L r simultaneously recorded from the readout signals of devices L and L ̄ . (c) Phase profile φ R C P r of the RCP component of the incident light (grey trace) and computationally reconstructed image (red trace). (d) Phase profile φ L C P r of the LCP component of the incident light (grey trace) and computationally reconstructed image (blue trace).

Fi

3 Discussion

我们

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4 Materials and methods

Design simulations. All the simulations presented in this work were carried out with the Ansys-Lumerical FDTD Solutions software package. The two angular response traces of Figure 1b were generated by computing the transmission through the entire metasurface of, respectively, an RCP and LCP diffractive plane wave incident from the air above as a function of angle of incidence θ. The reflection amplitude and phase values displayed in Figure 2b were computed via simulations of a single NP oriented along the axes of the metasurface array (i.e., with α = 0 in Figure 2a), using periodic boundary conditions and illumination at normal incidence with linear polarization along the NP axes.

Device fabrication. The experimental samples were fabricated on undoped (100) Ge substrates. The fabrication process includes electron-beam evaporation and plasma-enhanced chemical vapor deposition for the Au and SiO2 films, respectively, electron-beam lithography for the NP array, and focused ion beam milling for the slits. Each completed device was mounted on a copper block and wire-bonded to two Au-coated ceramic plates.

Device characterization. The measurement results presented in Figures 3 and 4 were collected with a custom-built optical goniometer setup that allows varying both polar θ and azimuthal ϕ illumination angles. The device under study is biased with a 1-V dc voltage and illuminated with 0.5-mW light from a diode laser (modulated at 1 kHz, so that the photocurrent can be separated from the dark current using a bias tee and lock-in amplifier). The laser light is delivered to the sample with a polarization-maintaining fiber mounted in a cage system, which contains a polarizer, a half-wave plate, and a quarter-wave plate used to generate the desired states of polarization.


Corresponding author: Roberto Paiella, Department of Electrical and Computer Engineering and Photonics Center, Boston University, 8 Saint Mary’s Street, Boston, MA 02215, USA, E-mail: 

Ahmet M. Erturan, Jianing Liu, and Maliheh A. Roueini contributed equally.


Award Identifier / Grant number: ECCS 2139451

Acknowledgements

The FDTD simulations were performed using the Shared Computing Cluster facility at Boston University. Some of the fabrication tasks were carried out at the Center for Nanoscale Systems of Harvard University.

  1. Research funding: This work was supported by the National Science Foundation under Grant # ECCS 2139451.

  2. Author contributions: AME and JL designed the metasurfaces. JL, MAR, and AME fabricated the samples. MAR, JL, NM, and AME contributed to the device measurements. JL and NM developed the computational imaging codes. RP and LT supervised all the project activities. All authors participated in the data analysis and writing of the manuscript. All authors have accepted responsibility for the entire content of this manuscript and consented to its submission to the journal, reviewed all the results and approved the final version of the manuscript.

  3. Conflict of interest: Authors state no conflicts of interest.

  4. Data availability: The datasets generated and/or analyzed during the current study are available from the corresponding author upon reasonable request.

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Supplementary Material

This article contains supplementary material (https://doi.org/10.1515/nanoph-2024-0759).


Received: 2024-12-19
Accepted: 2025-02-24
Published Online: 2025-03-25

© 2025 the author(s), published by De Gruyter, Berlin/Boston

This work is licensed under the Creative Commons Attribution 4.0 International License.

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