Reflection-mode Computational 3D Phase and Polarization Imaging for Semiconductor Wafer Metrology and Inspection

Sponsor: Samsung

Award Number: N/A

PI: Lei Tian

The goal of this project is to prototype a reflection-mode computational microscope to 1) provide wide field-of-view (FOV) and high-resolution phase reconstruction using a new reflection-mode Fourier ptychography (FP) algorithm; 2) enable 3D phase reconstruction based on a new reflection-mode multi-slice beam-propagation method (MS-BPM) model; and 3) investigate the utility of polarization sensitive contrast in both 2D and 3D.